During this paper, the new lapping slurry and polishing slurry are launched. Plus the deliquescence diploma of CLBO is fallen to most affordable. A fresh Performing technological know-how can also be adopted. Soon after rough polishing, the concentration of ultra-precision sprucing slurry is amplified properly. So does the extremely-precision sprucing pace, as well as wiping pace is quicker as opposed to deliquescence pace. The CLBO crystal surface roughness can attain 1nm and retain the floor high-quality effectively. Accessibility by way of your establishment
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The common power with the NIR laser nonetheless has the probable to be improved to tens of watts for instance 70 W [26] if the double-pass configuration could be used for the Yb:YAG SCF amplifier phase. That's why, When the conversion effectiveness of 31% from NIR to DUV might be however maintained at this increased power issue, the average output ability in the DUV laser at 258 nm can be over twenty W, which might certainly be a remarkable energy degree to the DUV laser and cause the unanticipated DUV laser machining effects. What's more, for top-electricity DUV laser, the UV harm of your nonlinear crystal, including the windows for CLBO crystal as well as the mirrors, is another essential parameter for lasting and secure Procedure.
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What's more, combining the solid-condition laser with other nonlinear approach for instance more info stimulated Raman scattering, NIR lasers can be accomplished at new wavelengths with large electricity and substantial beam excellent, which was examined via the evidence-of-theory experiment. This Raman laser scheme provides a new path to the significant-electricity DUV laser, Specially on the wavelength of 193 nm.
The beam profile demonstrated in Determine 7b shown a fantastic beam quality as among the merits of Raman laser, which might be effective to generate a 193-nm DUV laser with a top quality beam.
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